Laboratory High Vacuum Coater Thermal Evaporation Carbon Coating Machine for Photovoltaic Industry

Model： SD-100AF

Technical specifications

Vacuum Pump	(Oil required) Rotary Vacuum Pump
Rotary Pumping Speed	50 Hz: 16 m3/h (4.4 L/s) / 60 Hz: 19.2m3/h (5.2 L/s)
Turbo Molecular Pumping Speed	600 L/S
Vacuum Limit	5x10-4Pa
Max Evaporation Current	100A
Working Pressure	5x10-3Pa
Vacuuming Time	5 Min ( 2 Pa )
Vacuum Measure	Measuring range from atmosphere to 1x10-5 pa
Chamber Size	(p250*300mm(height) Scratch Resistant Quartz Glass
Evaporation Target Source	Target material: Carbon Rod ((p5mm) / Target source: Carbon Rod
Operation Method	Instruction Manual