Laboratory Acceleration Adjustable Coating Machine Vacuum Spin Coater with Automatic Pick-up Alert Function

Applicable substrate

5-120mm silicon wafers and other materials (5 inches)

Film speed range

50-10000RPM

Acceleration range

10-10000RPM/S, adjustable

Coating time

The time can be set arbitrarily without limit

Man-machine interface

4.3 inch color touch screen

Coating cavity (material)

Stainless steel glue pot

Vacuum cups (material)

Aluminum alloy (free three sizes of suction cups, size 5-120mm customer choice)

Speed accuracy and stability

±1RPM

The uniformity of the glue

Plus or minus 1%

Direction of rotation

Reversible

Stylus

BAMBOO Resistance Pen (standard)

Set data

Unlimited group data, each group of 10 speeds(standard)

Every time

0-10000 seconds

Store data

Unlimited data

Gluing machine power supply port

AC100-250V

Vacuum pump power supply port

AC220V(standard) AC110V(optional)

Vacuum pump model

SC-310V oil-free vacuum pump

Vacuum pump pumping speed

≥50L/min

Vacuum pump noise

≤55DB

Vacuum pump minimum vacuum

-85KPA

Glue machine power

200W

Vacuum pump power

180W

Dimensions(Spin Coater)

210mm(W)X220mm(D)X160mm(H)

Dimensions(Vacuum pump)

185mm(L)*100mm(W)*210mm(H)

Homogenizer weight

10KG

Pump weight

4.5 KG

Relative humidity

< 85%

Ambient temperature

0 to 40 ℃

Warranty period

1 year