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Small Spin Coater ( Max. 8000 Rpm, 4" Wafer Max.) With 3 Sets Of Vacuum Chucks & Complete Accessories

  • Model Number:

    TMAX-512
  • Dimension(L*W*H):

    13''(L) x 10''(W) x 8.5''(H)
  • Net Weight:

    15 kg (33 lbs)
  • Compliance:

    CE certificate
  • Warranty:

    Two Year Limited Warranty With Lifetime Support
  • Payment:

    T/T, Credit Card, Paypal, LC, Western Union
  • Delivery Time:

    3 Days
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Email:David@battery-equipments.com
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DESCRIPTION

Small Spin Coater ( Max. 8000 Rpm, 4" Wafer Max.) With 3 Sets Of Vacuum Chucks & Complete Accessories


SPECIFICATIONS:

Structure
                   
  • Aluminum casting case to keep spinning stable
  • Liquid disk made to resist most of the corrosive solutions
  • Drainage outlet and vacuum pump connector are on back panel
  • One filter is included in standard package. It is used to connect the coater for preventing waste water flowing into the pump
  • One oil-less vacuum pump is included in the standard package, please click here for specification details.

Chamber  & Vacuum Chuck 


  • Chamber Diameter: 145 mm
  • 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')
  • 1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
  • Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  ( 5x5, or 10x10mm) or irregular shape. 
Vacuum Pump
  • Vacuum grade rubber pipe is included for immediate use

Spin Speed & Time 
 
  • Digital control panel with TWO programmable segments for different spin times and speeds
  • Spinning speed: 500 - 8000 RPM  
  • Spinnning Time: 1 - 60s
Liquid Injecting

  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod 
Optional
  • You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 
  • Using plasma cleaner to treat substrate surface before coating can improve film quality
  • You may consider our new product: Heatable syringe 
  • Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available 
Input Power
110VAC or 220VAC please select the voltage in options bar (10A fuse)
Motor Power
24V DC motor  with 150W Max. 
Product Dimensions
13''(L) x 10''(W) x 8.5''(H)
Net Weight
15 kg (33 lbs)
Compliance
  • CE Certified.
  • NRTL certification is available upon request at extra cost  ( Please notice us before ordering if you need NRTL ).
Warranty
  • Two years limited with lifetime support.
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty.
Shipping Weight

        46 kg (100 lbs)

Application Notes
  • Please clicks here to review an article on "Spin Coater Theory and Processing".
  • In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click the pictures below for more details) prior to coating. This will significantly reduce the surface tension on the substrates. 
  • Cleaning instruction for the spin coaters.
  • You may consider our new product: Heatable syringe and spin coater with heatable cover.
  • Strongly suggest you put the coater under a fume hood as below right.
  • When using the coater in glovebox with Ar gas, vacuum pump must put in outside the glovebox via vacuum feedthrough or adaptor.
Warnings
  • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions
40"(L) x 28"(W) x 24"(H)
Shipping Weight
46 kg (100 lbs)

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