1200C Three Zones CVD Tube Furnace With 4 Channel MFC Gas Station

 tube furnace

Casing

Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.

Processing Tube

Material: Fused quartz tube

Thermal Block Placement

Power

7KW

Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

Fe-Cr-Al Alloy doped by Mo

Working Temp.

Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C

Heat-up Rate 

Heat-up rate: 1~20°C/min programmable

Heating Zone Length

Total heating zone: 900mm   (300mm + 300mm + 300mm)

Temp. Controller

• Three precision temperature controllers to control three zones separately.
• PID automatic control with 30 steps programmable segments.
• Temperature accuracy: ±1°C
• Thermocouple: K type built inside the furnace

Vacuum Seal

One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves 
- one KF-40 connector for the high vacuum station.

Rated Voltage

AC 208-240V Single Phase, 50/60Hz

Dimension

1100(L) x 450(W) x 670(H), mm

High Vacuum Station

Structure

Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included

Volume Flow Rate

Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-8 mbar (without any leaking )

Voltage & Power

110VAC or 220VAC, 110W

Mass Flow Gas Control

Structure

• 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software
• LED display
• 4 channel MFC Made of 316 stainless steel with gas flow range as below:
• Controller 1: 0~100SCCM
• Controller 2: 1~199 SCCM
• Controller 3: 1~199 SCCM
• Controller 4: 1~499 SCCM
• 4 Channel gas go through a Gas mixing tank: Φ80X120mm  
• Dimension: 600(L) x 745(W) x 700(H), mm

Power

18W

Rated Voltage

AC 208-240V, Single phase, 50/60Hz

Shipping Dimension

Total Three Pallets   （ #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" ）

Shipping Weight

850 lbs

Warranty

Two years limited warranty 
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, 
please order the replacement at related products below.)

Compliance

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified
• The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks