1200C Laboratory 2-5" Single Zone Vacuum Rotary CVD Tube Furnace

Model

TMAX-DSP-1200-CVD-I

TMAX-DSP-1200-CVD-II    

Power

3.5 KW

4 KW

Tube Size

Dia 60(OD) X1200 mm

Dia120(OD)X1200 mm

Product Dimensions (mm)

580x370x1050

600x440x1100

Furnace Construction

1.     Double shell casing with three cooling fans

2.     High purity Alumina fibrous insulation for max. energy saving

3.     Gear DC motor drives quartz tube with variable speed 0 - 10 RPM

4.     The furnace can be tilted up to 30o by electricity.

5.     Split cover enables faster cooling and easy operation

Heating Zone length

16" (400 mm) heating zone

Gas Fittings

Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting: Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

1100°C for continuously 1200 °C Max for < 2 hours

Temperature Controllers

PID digital temperature controller with 30 segment programmable,  +/- 1°C

Thermocouple

Omega K type 3mm OD x 6" L with high-temperature tolerance (220°C) connector

Tube rotating Speed

0 - 25 RPM variable

Furnace tilt angle

 Left: 0~30° ; Right: 0~15°

Chamber pressure

4.5x10-2 torr (<0.1mtorr/s leaking rate if close all the valves to airtight the tube chamber)

Production yield

 2 kg per batch

Voltage

208 - 240V single phase (30 A Breaker required)

Warranty

Two years limited warranty with lifetime support.

Compliance

CE