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1200℃ Dual Zones Sliding PECVD Furnace

Model Number:
TMAX-1200-1200
Compliance:
CE certificate
Warranty:
Two Year Limited Warranty With Lifetime Support
Payment:
T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:
3 Days

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Email:David@battery-equipments.com
Wechat:13506084915

DESCRIPTION

1200℃ Dual Zones Sliding PECVD Furnace

TMAX-1200-1200 slip-type two-temperature area PECVD system is composed of TMAX-1200-1200 slip-type two-temperature vacuum tube furnace, quartz vacuum chamber, radio frequency power supply, GX gas supply system, pumping system and vacuum measuring system.

Main features:

1. The gas in quartz vacuum chamber is changed into ionic state by rf power supply.

2. PECVD is lower than normal CVD for chemical vapor deposition

3. The stress of the deposited films can be controlled by the frequency of rf power supply

4. PECVD has high deposition rate, good uniformity, consistency and stability than normal CVD.

5. Widely used in the growth of various films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-si: H), etc.

This slide TL1200-1200 type double temperature PECVD system technique is a rapid heating, cooling temperature PECVD system technique, is in the temperature range of double PECVD system installed on a pair of slide rail, technique available manual sliding system.

Heating and cooling rate of up to 100 ° C/min.

To get the fastest heating, heat the stove to the set temperature beforehand, then move the furnace to the sample position.

To get the fastest cooling, move the stove to the other end after the sample is heated.

Heating and cooling rate under vacuum or inert gas environment can reach 10 ° C/s, is a low cost rapid heating and cooling temperature range of double PECVD system technique.

1. Kanthal A1 resistance wire of Sweden

Kanthal A1 Original wire Chinese resistance wire furnace VS Imported resistance wire furnace

(1), high surface temperature can reach 1420 ℃

(2) the surface is stainless steel (very bright, the customer should pay attention to it), it will not rust, and the use time will not fall off the slag.

(3) data of Kanthal resistance wire is downloaded

(4) Kanthal resistance wire website: www.kanthal.com

(5) the resistance is balanced and the temperature field is equally good

Most of the manufacturers use fe-cr-al Alloy doped by Mo resistance wire, which

Sometimes the resistance is uneven and part of the heat is small Kanthal A1 resistance is uniform and heat balanced, good Temperature field effect

2. Installation of air switch and leakage protector:

When an electric current or leakage, an empty meeting automatically disconnects.

3. Can connect with computer

This furnace is equipped with communication interface and software, can be directly through the furnace computer control of each parameter, and can be observed from the computer PV on the stove and SV temperature value and instrument operation, the actual temperature of the furnace curve drawing computer real time, and can keep the temperature data of each time, can call up at any time

4. Chamber

(1) High quality high pure alumina polycrystalline fiber cured furnace with vacuum suction and filter molding.

(2). Adopt Japanese technology to form.

(3). The spacing and pitch of the resistance wire in the furnace are arranged according to the best thermal technology of Japan, and the temperature field is simulated by thermal software

(4). Using 4 weeks heating, the temperature is more balanced

5. optional UL certified electrical board (all through the UL certification of imported electrical appliances)

6. Trigger

Soft-start current limiting trigger Most manufacturers use non-limiting Xiamen Bode triggers

1 phase shift trigger (with soft start and current limiting function)

2. Current limiting function no matter how to adjust the heating time we electric furnace after the transformer secondary current is limited to 170A or less limited protection of the equipment. Non-limiting trigger if the heating rate is set incorrectly or too fast. Low current current is very large the device will trip or burn out.

3 soft-start function the current will slowly increase the current the impact of the heating element is small is conducive to the extension of the life of the heating element

4 the protection function If the current exceeds the limit current the trigger will automatically cut off the trigger function to cut off the current protection furnace.

7. UL certified transformer

1 the transformer cable is pure copper

2 the transformer sound small

3 the transformer temperature is low

8. A variety of options to choose a variety of flanges (diameter from 25 to 250mm)

model	TMAX-1200-1200 - I	TMAX-1200-1200-II	TMAX-1200-1200-III	TMAX-1200-1200-IV
power	3 kw	3 kw	4 kw	4 kw
Tube size	120 (OD) X1800mm Dia	60 (OD) X1800mm Dia	80 (OD) X1800mm Dia	100 (OD) X1800mm Dia
Overall dimensions(LXDXH)	1800 x480x680	1800 x410x610	1800 x410x610	1800 x460x660
The power supply voltage	220 v
Slide rail material	304 stainless steel
Sliding mode	stainless steel rolling bearing
Number of phase	Single phase
Heating element	Import Swedish Canthal A1 resistance wire click into data download
The control mode	Using the yu electric program control thermometer (standard) 1. 30 program control temperature intelligent PID adjustment. 2. The heating circuit of the electric furnace can be automatically cut off when it has been protected by warm or broken accidentally. (when the furnace temperature exceeds 1200 degrees or the thermocouple is broken, The ac relay ON the main circuit will be automatically disconnecting, the main circuit is broken, the light ON the panel is out, OFF the light, the limited protective electric furnace. 3. With 485 communication interface (standard and standard for choosing software) 4. It has the function of power failure protection, that is, when the power is off, the program will not start up from the beginning temperature, but the furnace will start to rise when the power is off. The instrument has the function of temperature self-setting (to replace the imported instrument, we need to pay another fee.) FP93 temperature control table(SHIMADEN) European instruments Touchscreen instrument
The temperature control mode	PID
Broken even protection and display	Yes
Over temperature protection	Yes
Over current protection	Yes
Control precision	+ / - 1 ℃
The trigger	Phase shift trigger
Electrical appliances	Zhejiang chint
Silicon controlled rectifier	106/16e west gate, Germany
The highest temperature	Temperature Zone1: 1200 ℃ temperature zone 2:1200 ℃
The rated temperature	Temperature Zone1: 1100 ℃ temperature zone 2:1100 ℃
Heating rate	The 20 ℃ / Min or less (can modify according to the requirement)
Recommended heating rate	10 ℃ / Min or less
Model of thermocouple	Zones 1: temperature range of K type 2: K type
Heating length	Zones 1: temperature range of 200 mm. 2:200 mm
Electrical certification	CE
Surrounding surface temperature	45 ℃ or less
Rf power supply	(plasma generator)
Power output range	0-500 w
Maximum reflected power	200 w.
Working frequency	Rf: 13.56 MHZ plus or minus 0.005%
Power stability	+ / - 0.1%
Harmonic component	- 50 or less DBC
Rf width	0-600 - mm is adjustable
Matching mode	automatic
Cooling mode	Air cold
noise	The < 50 db
The radio frequency interface	50 Ω N - type
Input power	208-240 - v 50/60 hz
Main parameters of GX gas supply system	mass flowmeter The standard range Using the proton flow controller 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range of the range and the type of the gas) Maximum working pressure 3 mp The accuracy of Plus or minus 1.5% The pressure drop < 0.01 mpa < p = "" > Repeat accuracy Plus or minus 0.2% F.S
Channles:	1, 2, 3, 4, 5, 6, 7, 8 (optional )
Joint type	Double cassette stainless steel connector
System work pressure range	0.1 ~ 0.5 MPa
Working temperature	5-45 ℃
Pressure vacuum watch	0.1 ~ 0.15 MPa to 0.01 MPa/case
Static mixing chamber	Dia50 X 400 mm
interface	Dia6 1/4"
The power supply	220 v
size	600 x600x600
Corrugated pipe	KF25X1000mm
The vacuum degree can be reached with this system	10-1 the pa
Vacuum baffle valve	KF25
VRD to 8 vacuum pump
model	VRD to 8
Limiting partial pressure	5 x10-2 Pa
Inlet exhaust interface	KF25
Motor speed	1440 RPM
Extraction rate	2.2 L/S
Motor power	0.4 KW
Perfeer ACP1 Oil-free multi-stage roots pump (plan 2)
Model	ACP15
Power supply	AC100 ~ 240V 50/60hz
Power	450 w
Exhaust interface	KF25
Weight	25 kg
The maximum helium leakage rate is	5 · 10-8 Pa m3 / s
Extreme vacuum degree	0.02 Torr
The extraction rate is	14 m3 / h
model	ZDR - 1
power	25 w.
Vacuum degree measurement range	0.1-10 5 Pa
Resistance silicon	What ZJ had to 52 t
Sweden (INFICON) Pirani capacitance vacuum meter (optional)
model	PCG554
Input voltage	24V 1A DC (equipped with 220V transformer)
Vacuum gauge interface	KF16
Digital display	Digital display (screen size 20x14mm), whose data display unit is torr
Product size	46mm x 28mm x 126mm (L x W x H)
The weight of the	5 LBS
Detection of gas	Various gases can be detected including mixed gases, accurate and repeatable.
Whether the anti-corrosion	Corrosion protection
The response time	30 ms or less
Measuring range	3.8 x10-5-1125 Torr.
Molecular pump unit (optional)
Unit input voltage	380 v / 220 v
Corrugated pipe	KF40X1000
Vacuum baffle valve	KF40
Case size	600 x600x600
Molecular pump model	FJ620
Input voltage	380 v
Molecular pump inlet flange	DN160
Molecular pump pumping rate L/S (for air)	600
Molecular pump limit pressure (Pa)	6 x 10-7
Cooling system	Water cooled
Cooling water pressure (MPa)	0.1 to 0.2
Cooling water temperature	< 25 ℃ < p = "" >
The environment temperature	0 ~ 40 ℃
Suggested starting pressure	< 100 pa < p = "" >
Engine vacuum pump RVP - 6
power	0.75 KW
voltage	380 v
speed	1450 RPM
Inlet diameter	KF25 / KF40
Pump pumping rate (L/S)	6
Ultimate pressure	4 x10-2 pa
German Pfeiffer vacuum pump
voltage	220 v
power	110 w.
Extraction interface	KF40
The weight of the	150 kg
Pump speed of the front pump	0.9 m 3 / h
Extraction rate (N2)	33 m/S
Compound vacuum gauge
Compound vacuum gauge model	ZDF
The power supply	220 v 55 w
Control precision	Plus or minus 1%
Vacuum gauge measurement range	10-5-10 5 Pa

Parts	Number
TL1200-1200 Tube furnace	1 set
quartz tube	1
SS Flange	1 set
Stainless steel hook	1
Alumina furnace plug	3
High temperature gloves	1 pair
alumina crucible	1
Ｋ thermocouple	1
485 transform interfaces and software（optional）	1 set
Instruction book	1
Flange support	1
Gas supply system	1
VS-0.1air extracting system	1
RF power	1
Ferrule	4个
Bellow	1
Vacuum baffle valve	1
Cyl connector（N stands for number of channels）	N
Valve connector	2
PTFE pipe (N stands for number of channels)	N*5

PECVD furnace

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