1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System

Model Number:
TMAX-VerticalPECVD
Compliance:
CE certificate
Warranty:
Two Year Limited Warranty With Lifetime Support
Payment:
T/T, Credit Card, Paypal, LC, Western Union
Delivery Time:
3 Days

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Email:David@battery-equipments.com
Wechat:13506084915

DESCRIPTION

1200°C Vertical PECVD Furnace With RF Generator, Gas Mix & Pumping System

TMAX-1200-PECVD series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.

Features

· Compact, portable and lightweight design.

· Lower processing temperatures required compare to conventional CVDs.

· Film stress can be controlled by high/low frequency mixing techniques.

· Split furnace chamber for fast and easy tube access.

· Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

· Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

· Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

· Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

· Built-in computer interface.

· Long life type K thermocouple.

· Slidable furnace option gives you ultra fast cooling rates

Furnace, vacuum pump and gas mixing system specifications

Tube material	Quartz
Heating element	Kanthal® (Sweden) resistance coil wire
Max. vs constant working temperatures	1200°C max. and 1100°C constant
Thermo couple type	K
Refractory lining	Mitsubishi® (Japan) 1500 grade fiber alumina
Temperature controller	Shimaden® (Japan) fp93 with 4 programs and 40 segments (ie. 4 x 10 segments or 2 x 20 segments)
Maximum heating & cooling rate	< 30°C / min
Temperature controller precision	+/- 1°C (+/- 1.8°F)
Vacuum sealing flange kit	Stainless steel vacuum sealing flanges with one vacuum gauge, two valves and four thermal ceramic blocks.
Electrical requirements	220VAC, 3.5KW, single phase

RF generator specifications

Electrical requirements	208-240 volts 50/60 Hz
Output power	5 to 500 watts, adjustable in +/-1% step
RF frequency	13.56 MHz with +/-0.005% stability
Reflection power	10 watts max.
Matching	Automatic
RF output port	50 Ω, N-type, female
Cooling	Air

Part description	Quantity	Part image
split tube furnace	1 set
Multi-channel gas supply system	1 set
Plasma RF power supply (optional)	1 set
Vacuum pump and enclosure (optional)	1 set
Quartz tube	1 pc
Teflon Tube(N Stand for number of tubes)	N*5
Stainless steel vacuum sealing flanges w/ pressure meter	1 set
Stainless steel hook	1 pc
Alumina ceramic thermal block	2 pairs
Thermal gloves	1 pair
High temperature Al2O3 alumina crucible	5 pcs
Spare fuse	2 pcs
USB/RS485 computer interface kit	1 set
Furnace and Shimaden controller manual	2 pcs