1100ºC UL Standard RTP Furnace With 4" ID Quartz Tube & Digital Vacuum Gauge

Furnace Structure

• Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
• High purity fibrous alumina insulation for maximum energy saving.
• Split cover with Interlock protection, cut the power if lid open during furnace heating process.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required) 

Heating Elements

• 8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)
• Standard working life: 2000 hrs.  ( depends on heating rate )
• The Halogen light tube is consumable.  Please click picture left to order spare one

Heating Zone

12" length with 4" constant temperature zone within +/-5ºC uniformity

Working Temperature

• 1100ºC Max. for < 10 minutes
• 1000ºC Max. for < 20 minutes   (Note: if running longer time, furnace case will > 100oC, must use fan cooling case from outside )
• 800ºC Max.   for < 120 minutes
• 600ºC Max.   for Continuous 

Max. Heating Rate

50ºC/sec

Cooling Rate

• Max. Cooling: 60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (under atmospheric pressure) 
• Lowest Cooling:   10 ºC / minute

Thermocouple

K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath 

Temperature Controller

• temperature controller is included.
• Proportional–integral–derivative control (PID control) and auto-tune function
• 30 segments programmed with ramping, cooling and dwelling steps
• Built-in over-temperature alarm and thermocouple failure alarm
• +/- 1 ºC temperature control accuracy
• Default DB9 PC communication port
• MET Certified

Temperature controller (optional)

• MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package  is available at the options bar.
• You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 

Quartz Tube & Sample Holder

• Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length. One 3" Diameter AlN sample holder for annealing samples up to 3" Dia is included. AlN has a very high thermal conductivity which provides the best temperature uniformity in the sample area.
• Optional:  3'' O.D Thick Graphite Substrate can be used as an alternative to AIN plate. (please click pic-3 below to order)
• Optional: Graphite Crucible:87 mm OD x 71 mm ID x 12 mm Height with lid is designed for 3" sample holder, can also be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC.
• The sample holder is removable from the flange for using the RTP furnace for other purposes.

Vacuum Flange

• KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and water cooling jacket.
• Only requires water cooling in long running times at temperatures > 600oC.
• Circulating water rate: 0.5 m3 /hr.
• The slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.
• Insert-able thermal-couple for accurate measurement. 
  
  

Vacuum Pump  (optional)

• EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump. 

Water Cooling  (optional)

• Cooling water is required.
• Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
• We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   
• Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. 

Flow-meter

One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min

Vacuum Gauge

Digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.

Vacuum Pressure & Gas Fitting

• Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter
• Pressure can reach 10-4 torr by molecular pump with KF25 adapter

Dimensions

•  Flange closed: 760mm(L) X 330mm(W) X 530mm(H) /Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)

Net Weight

70 kg (150 lbs)

Warranty

Two years limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.
• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
• Note: 
  The software is only compatible with MTI’s Yudian Temperature Controller
      

• You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. Click pictures below to see details
• For achieving fast cooling rate (< 10ºC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see details.

• You may order pressure control module.     
•  

Application Notes

   

• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.  This furnace also can be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY )
• After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.